Optical Measurement of Resonant Oscillation and Marangoni Convection-Induced Oscillation in a Molten Silicon Surface
Optical Measurement of Resonant Oscillation and Marangoni Convection-Induced Oscillation in a Molten Silicon Surface
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熔融硅表面谐振振荡和马兰戈尼对流诱发振荡的光学测量
DOI：
10.1143/jjap.39.3688
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发表时间：
2000
影响因子：
1.5
通讯作者：
T. Hibiya
中科院分区：
文献类型：
--
作者：
Masanobu Sumiji;Shin Nakamura;K. Onuma;T. Hibiya
用干涉法观测了熔融硅液桥中Marangoni流动引起的表面振荡。为了获得更高的分辨率，从熔融硅表面和参考样品的干涉图转换为相位分布轮廓，通过使用空间相位测量。通过测量径向位移、方位向相位值梯度和轴向相位值梯度，分析了相位分布剖面。在2.0 s的时间内，总径向位移约为1.5 µm。径向位移和轴向相位值梯度呈同相相关，表明在方位方向上存在行波。径向位移的傅立叶频谱在0.5 ~ 5 Hz范围内出现多个峰值。这些频率与基于其他方法报告的马兰戈尼流频率相对应。光谱还显示在21和24.5Hz处的两个单峰。这些频率与液桥的理论谐振频率一致。
Surface oscillation due to oscillatory Marangoni flow in a liquid bridge of molten silicon was observed through interferometry. To obtain higher resolution, interferograms taken from a molten silicon surface and a reference sample were converted to phase-distribution profiles by using spatial phase-measurement. We analyzed the phase-distribution profiles by measuring the radial displacement, azimuthal phase value gradient, and axial phase value gradient. The total radial displacement was about 1.5 µm over a 2.0-s period. The radial displacement and axial phase value gradient showed in-phase correlation, which suggests a traveling wave in the azimuthal direction. The Fourier spectrum of the radial displacement showed several peaks from 0.5 to 5 Hz. These frequencies corresponded to the frequencies of Marangoni flow reported based on other methods. The spectrum also showed two single peaks at 21 and 24.5 Hz. These frequencies agreed well with theoretical resonant frequencies of the liquid bridge.