Artificial SrTiO3/SrO Superlattices by Pulsed Laser Deposition
Artificial SrTiO3/SrO Superlattices by Pulsed Laser Deposition
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脉冲激光沉积人造 SrTiO3/SrO 超晶格
DOI：
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发表时间：
1999
期刊：
影响因子：
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通讯作者：
M. Fujimoto
中科院分区：
文献类型：
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作者：
Y. Iwazaki;Toshimasa Suzuki;S. Sekiguchi;M. Fujimoto
采用脉冲激光沉积技术，在SrTiO3衬底上外延生长了SrTiO3/SrO人工超晶格薄膜。通过周期性地引入Ruddlesden-Popper （RP）层来设计和制备人工超晶格。在超晶格生长过程中，反射高能电子衍射（RHEED）模式的强度随SrTiO3层的沉积而增加，随SrO单层的沉积而降低，交替发生。在SrO层沉积过程中，由于SrO的岛状生长，RHEED反射强度逐渐降低。在高温沉积的超晶格中观察到与薄膜表面垂直的不同类型的RP层，可能是由于SrO的高扩散条件和岛状生长所致。
Artificial SrTiO3/SrO superlattice thin films epitaxially grown on SrTiO3 substrates were fabricated by pulsed laser deposition. The artificial superlattices were designed and fabricated by introducing a Ruddlesden-Popper (RP) layer periodically. The intensity of reflection high-energy electron diffraction (RHEED) patterns during the growth of the superlattices increased at the deposition of SrTiO3 layers and decreased at the deposition of the SrO monolayer, alternately. The gradual intensity decrease of RHEED reflection during SrO layer deposition is attributable to the island growth of SrO. The different type of RP layers normal to the film surface, observed in a high-temperature deposited superlattice, may originate from the higher diffusion condition and island growth of SrO.