Energy and exergy analyses of atomic layer deposition of Al2O3 nano-film process
Energy and exergy analyses of atomic layer deposition of Al2O3 nano-film process
复制标题
Al2O3 纳米薄膜原子层沉积过程的能量和火用分析
DOI：
10.1504/ijex.2014.065107
复制
发表时间：
2014-10
影响因子：
1.3
通讯作者：
Yuan, Chris
中科院分区：
文献类型：
--
作者：
Li, Tao;Wang, Fenfen;Zhang, Hong-Chao;Yuan, Chris
本文对Al2O3纳米薄膜的原子层沉积（ALD）过程进行了能量和火用分析。首先，基于热力学第一定律，分析了Al2O3纳米薄膜制备体系ALD中的能量流。其次，根据热力学第二定律分析了系统内的火用流。介绍了两种不同的用能效率，包括用能效率的最简单定义和完美度。最后，采用两种不同的用能效率计算方法对系统的用能效率进行了计算。对Al2O3纳米膜工艺ALD的分析结果表明，ALD系统的能量效率极低。因此，在ALD运行过程中寻找降低能耗和提高能源利用效率的方法是必要和有意义的。
In this paper, energy and exergy analyses of atomic layer deposition (ALD) of Al2O3 nano-film has been conducted. First, based on the first law of thermodynamics, the energy flow in ALD of Al2O3 nano-film preparation system is analysed. Second, the exergy flow in the system is analysed based on the second law of thermodynamics. Two different kinds of exergy efficiencies are introduced, including the simplest definition for exergy efficiency and the degree of perfection. In the end, the exergy efficiency in this system is calculated by using the two kinds of exergy efficiency calculation methods. The results of analyses on the ALD of the Al2O3 nano-film process demonstrate the extremely low efficiency of energy in the ALD system. Thus, it is necessary and meaningful to find ways to reduce energy consumption and improve the energy utilisation efficiency in ALD operation process.