Forging of metallic nano-objects for the fabrication of submicron-size components
Forging of metallic nano-objects for the fabrication of submicron-size components
复制标题
用于制造亚微米尺寸部件的金属纳米物体的锻造
DOI：
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发表时间：
2007
期刊：
影响因子：
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通讯作者：
S. Kleindiek
中科院分区：
文献类型：
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作者：
J. Rösler;D. Mukherji;K. Schock;S. Kleindiek
近年来，纳米制造技术得到了长足的发展，但独立式纳米器件的制造仍然是一个巨大的挑战。这里展示了利用三个基本步骤的金属纳米元件的制造。首先，金属合金被用作工厂来大量生产纳米物体/纳米颗粒的金属原料。然后，使用操纵器将这些物体从扫描电子显微镜内含有数千个此类物体的粉末中分离出来，并放置在微砧或模具上。最后，通过使用微锤的纳米锻造来改变单个纳米物体的形状。以这种方式，独立的、高强度的金属纳米物体可以成形为具有100 nm范围内的尺寸的部件。通过组装这种纳米元件，可以制造出真正的微米级的高性能微系统（系统与其元件的尺寸比通常为10：1）。
In recent years, nanoscale fabrication has developed considerably, but the fabrication of free-standing nanosize components is still a great challenge. The fabrication of metallic nanocomponents utilizing three basic steps is demonstrated here. First, metallic alloys are used as factories to produce a metallic raw stock of nano-objects/nanoparticles in large numbers. These objects are then isolated from the powder containing thousands of such objects inside a scanning electron microscope using manipulators, and placed on a micro-anvil or a die. Finally, the shape of the individual nano-object is changed by nanoforging using a microhammer. In this way free-standing, high-strength, metallic nano-objects may be shaped into components with dimensions in the 100 nm range. By assembling such nanocomponents, high-performance microsystems can be fabricated, which are truly in the micrometre scale (the size ratio of a system to its component is typically 10:1).