NO2-sensing properties of porous WO3 gas sensor based on anodized sputtered tungsten thin film
NO2-sensing properties of porous WO3 gas sensor based on anodized sputtered tungsten thin film
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DOI：
10.1016/j.snb.2011.10.059
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发表时间：
2012-01-03
影响因子：
8.4
通讯作者：
Qin, Yuxiang
中科院分区：
文献类型：
--
作者：
Zeng, Jing;Hu, Ming;Qin, Yuxiang
本文采用直流磁控溅射沉积在氧化铝衬底上的金属钨(W)薄膜进行阳极氧化，制备了一种新型的多孔WO_3传感器。利用场发射扫描电子显微镜(FESEM)和X射线衍射仪(X射线衍射仪)对薄膜的结构和形貌进行了研究。经阳极氧化处理的W膜经退火后，得到了晶粒度约为9.3 nm的珊瑚状多孔晶态WO_3薄膜。多孔型WO_3传感器在150℃的低工作温度下对NO2的响应值达到最大值。与溅射WO_3传感器相比，多孔型WO_3传感器由于具有高比表面积和较小的颗粒尺寸，对不同浓度的NO2气体表现出明显更高的响应速度、更好的响应恢复特性和更低的最佳工作温度。(C)2011爱思唯尔B.V.保留所有权利。
In this paper, a novel porous WO3 sensor was prepared by anodic oxidation of DC magnetron sputtered metallic tungsten (W) film deposited on alumina substrate. The structural and morphological properties of these films are investigated using field emission scanning electron microscope (FESEM) and X-ray diffraction (XRD). Coral-like porous crystalline WO3 film with a grain size of about 9.3 nm was obtained after annealing of the anodized W film. The porous WO3 sensor achieved its maximum response value to NO2 at a low operating temperature of 150 degrees C. In comparison to sputtered WO3 sensor, the porous WO3 sensor showed markedly higher responses, much better response-recovery characteristics and lower optimal operating temperature to different concentration of NO2 gas due to its high specific surface area and small grain size. (C) 2011 Elsevier B.V. All rights reserved.