Accuracy improvement of protrusion angle of carbon nanotube tips by precision multiaxis nanomanipulator
Accuracy improvement of protrusion angle of carbon nanotube tips by precision multiaxis nanomanipulator
复制标题
DOI：
10.1063/1.1852312
复制
发表时间：
2005-01
影响因子：
1.6
通讯作者：
W. Song;K. Y. Jung;O. Beomhoan;B. Park
中科院分区：
文献类型：
--
作者：
W. Song;K. Y. Jung;O. Beomhoan;B. Park
为了制造碳纳米管（CNT）尖端，其中CNT的附着角度和位置被精确地调节，纳米操纵器被安装在扫描电子显微镜（SEM）内。碳纳米管针尖，原子力显微镜（AFM）的探针，其纳米管连接，是已知的最合适的探针，用于测量高纵横比的形状。所开发的纳米操纵器具有两组模块，其自由度为三个方向的直线运动和一个方向的旋转运动，精度为数十纳米，因此它能够制造更精确的CNT尖端。本研究通过多壁碳纳米管和AFM探针在扫描电镜中的三维操作，研制出了一种附着角误差小于10°的碳纳米管针尖。
In order to manufacture a carbon nanotube (CNT) tip in which the attachment angle and position of CNT were precisely adjusted, a nanomanipulator was installed inside a scanning electron microscope (SEM). A CNT tip, atomic force microscopy (AFM) probe to which a nanotube is attached, is known to be the most appropriate probe for measuring the shape of high aspect ratio. The developed nanomanipulator has two sets of modules with the degree of freedom of three-directional rectilinear motion and one-directional rotational motion at an accuracy of tens of nanometers, so it enables the manufacturing of more accurate CNT tips. The present study developed a CNT tip with the error of attachment angle less then 10° through three-dimensional operation of a multiwalled carbon nanotube and an AFM probe inside a SEM.