The effects of nanoscaled amorphous Si and SiNx protective layers on the atomic oxygen resistant and tribological properties of Ag film
The effects of nanoscaled amorphous Si and SiNx protective layers on the atomic oxygen resistant and tribological properties of Ag film
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DOI：
10.1016/j.apsusc.2012.02.062
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发表时间：
2012-05-15
影响因子：
6.7
通讯作者：
Liu, Weimin
中科院分区：
文献类型：
--
作者：
Hu, Ming;Gao, Xiaoming;Liu, Weimin
用磁控溅射法制备了Ag膜、Ag/Si和Ag/SiNx双层膜。利用地面原子氧模拟装置进行了原子氧辐照试验。利用X射线衍射（XRD）、X射线光电子能谱（XPS）、原子力显微镜（AFM）和扫描电子显微镜（SEM）分别分析了AO辐照前后薄膜的微观结构和成分。研究了纳米非晶Si和SiNx层对Ag膜抗原子氧性能的保护作用。结果表明，纳米Si或SiNx保护层能较好地保护Ag膜免受AO辐照氧化。非晶保护层表面在AO曝光过程中形成的氧化硅层是保护Ag膜不被氧化的关键。另一方面，在真空条件下，利用球盘摩擦磨损试验机对银膜和多层膜的摩擦学性能进行了对比研究。摩擦学试验结果表明，Ag/Si和Ag/SiNx薄膜在AO辐照前后均表现出比纯Ag薄膜更好的润滑性能。(C)出版社：Elsevier B. V.
The Ag film, and double layer films of Ag/Si and Ag/SiNx were deposited by magnetron sputtering technique. The atomic oxygen (AO) irradiation tests were conducted using a ground AO simulation facility. The microstructure and composition of these films before and after AO irradiation tests were analyzed using X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), respectively, atomic force microscope (AFM) and scanning electron microscopy (SEM), respectively. Then the protective effects of nanoscaled amorphous Si and SiNx layers on the atomic oxygen resistant property of Ag film were investigated. The results show that nanoscaled Si or SiNx protective layer can provide better protection to Ag film against oxidation caused by AO irradiation. The silica layer formed on the surface of amorphous protective layers during AO exposure process plays the key role in protecting Ag film from oxidation. On the other hand, the tribological performance of Ag film and the multilayer films was comparatively studied using a ball-on-disc tribometer in vacuum condition. The tribotest results indicate that Ag/Si and Ag/SiNx films show the better lubricating performance before and after AO irradiation than pure Ag film. (C) 2012 Published by Elsevier B.V.