Simple methods for estimating the performance and specification of optical components with anisotropic mid-spatial frequency surface errors.
Simple methods for estimating the performance and specification of optical components with anisotropic mid-spatial frequency surface errors.
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DOI：
10.1364/oe.27.032709
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发表时间：
2019-10
期刊：
影响因子：
3.8
通讯作者：
H. Aryan;G. Boreman;T. Suleski
中科院分区：
文献类型：
--
作者：
H. Aryan;G. Boreman;T. Suleski
中空间频率（MSF）误差曲面的规格和公差具有挑战性，需要新的工具来增强简单的表面统计，以更好地表示这些误差的结构特征。考虑了MSF误差的结构和各向异性及其对调制传递函数（MTF）的影响，提出了一种新的表面规格方法。结果是一个直观的极坐标带限RMS误差值图，其中包含了表面误差的各向异性信息，并使接受准则易于理解。讨论了各种方法、应用实例以及该方法与MTF的联系。
Specification and tolerancing of surfaces with mid-spatial frequency (MSF) errors are challenging and require new tools to augment simple surface statistics to better represent the structured characteristics of these errors. A novel surface specification method is developed by considering the structured and anisotropic nature of MSF errors and their impact on the modulation transfer function (MTF). The result is an intuitive plot of bandlimited RMS error values in polar coordinates which contains the surface error anisotropy information and enables an easy to understand acceptance criterion. Methods, application examples, and the connection of this surface specification approach to the MTF are discussed.