Control of in-plane texture of body centered cubic metal thin films
Control of in-plane texture of body centered cubic metal thin films
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体心立方金属薄膜面内织构的控制
DOI：
10.1063/1.366239
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发表时间：
1997
影响因子：
3.2
通讯作者：
R. Hammond
中科院分区：
文献类型：
--
作者：
J. Harper;K. Rodbell;E. Colgan;R. Hammond
结果表明，在不同的沉积条件下，在非晶态衬底上沉积的体心立方(BCC)金属薄膜可以产生明显不同的面内织构。在非晶态衬底上制备的体心立方多晶金属薄膜的晶体取向分布往往具有较强的<110>纤维织构，表明{110}面平行于衬底平面。当高能离子或原子以非正常入射角轰击沉积时，<110>纤维织构形成面内织构，表明晶体的非随机方位取向。在不同的沉积几何条件下，Nb薄膜中观察到了三种取向，其中高能粒子通量与体心立方晶体结构中的沟道方向一致。在不同结构的磁控溅射系统中也获得了Mo薄膜的面内取向。文中对这些问题进行了描述，并给出了一个算例。
We show that dramatically different in-plane textures can be produced in body centered cubic (bcc) metal thin films deposited on amorphous substrates under different deposition conditions. The crystallographic orientation distribution of polycrystalline bcc metal thin films on amorphous substrates often has a strong 〈110〉 fiber texture, indicating that {110} planes are parallel to the substrate plane. When deposition takes place under bombardment by energetic ions or atoms at an off-normal angle of incidence, the 〈110〉 fiber texture develops an in-plane texture, indicating nonrandom azimuthal orientations of the crystallites. Three orientations in Nb films have been observed under different deposition geometries, in which the energetic particle flux coincides with channeling directions in the bcc crystal structure. In-plane orientations in Mo films have also been obtained in magnetron sputtering systems with various configurations. These are described, and an example is given in which the in-plane orienta...