The effect of SiO2, Pt, and Pt∕Au templates on the microstructure and permittivity of BaxSr1−xTiO3 films
The effect of SiO2, Pt, and Pt∕Au templates on the microstructure and permittivity of BaxSr1−xTiO3 films
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SiO2、Pt和Pt∕Au模板对BaxSr1−xTiO3薄膜微观结构和介电常数的影响
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发表时间：
2006
期刊：
影响因子：
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通讯作者：
S. Gevorgian
中科院分区：
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作者：
P. Rundqvist;T. Liljenfors;A. Vorobiev;E. Olsson;S. Gevorgian
采用脉冲激光沉积法在SiO2 scinSi、Pt scinTiO 2 scinSiO 2 scinSi和Pt scinAu scinPt scinTiO 2 scinSiO 2 scinSi模板上生长了Ba 0.25 Sr 0.75 TiO 3（BSTO）和SrTiO 3（STO）铁电薄膜。使用X-射线衍射，原子力显微镜，和透射电子显微镜的多层堆叠的微观结构和表面形貌进行了研究。微结构分析表明，铁电薄膜为多晶织构，具有柱状结构，晶粒尺寸为50- 100 nm。在800°C下在非晶SiO2 scinSi模板上沉积的BSTO薄膜显示出具有主要（110）取向的织构结构，这可以通过由于（110）相的较低表面能而导致的BSTO（110）晶粒的主要生长来解释。STO和BSTO薄膜在650°C下分别沉积在Pt scinTiO 2 scinSiO 2 scinSi和Pt scinPt Au scinTiO 2 scinSiO 2 scinSi模板上，显示出（111）取向的结构，这是由于BSTO（STO）（111）晶粒的优势生长受到下面的Pt（111）织构的影响。
Ba0.25Sr0.75TiO3 (BSTO) and SrTiO3 (STO) ferroelectric thin films were grown on templates of SiO2∕Si, Pt∕TiO2∕SiO2∕Si, and Pt∕Au∕Pt∕TiO2∕SiO2∕Si using pulsed laser deposition. The microstructure and surface morphology of the multilayer stacks were studied using x-ray diffraction, atomic force microscopy, and transmission electron microscopy. The microstructural analysis shows that the ferroelectric films are polycrystalline textured with a columnar structure where the grain size is 50–100nm. The BSTO films deposited at 800°C on an amorphous SiO2∕Si template reveal a textured structure with a dominant (110) orientation, which is explained by a dominant growth of BSTO (110) grains due to the lower surface energy of the (110) phase. The STO and BSTO films deposited at 650°C on the Pt∕TiO2∕SiO2∕Si and Pt∕Au∕Pt∕TiO2∕SiO2∕Si templates, respectively, reveal a structure with a dominant (111) orientation, which is explained by the dominant growth of BSTO (STO) (111) grains imposed by the underlying Pt (111) textur...