Femtosecond laser direct writing of metallic microstructures by photoreduction of silver nitrate in a polymer matrix
Femtosecond laser direct writing of metallic microstructures by photoreduction of silver nitrate in a polymer matrix
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DOI：
10.1364/oe.16.001174
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发表时间：
2008-01-21
期刊：
影响因子：
3.8
通讯作者：
Saeki, Tatsuya
中科院分区：
文献类型：
--
作者：
Maruo, Shoji;Saeki, Tatsuya
采用飞秒脉冲激光束对含有银离子的聚乙烯吡咯烷酮（PVP）薄膜进行三维激光直写，制备了连续的银微结构。通过扫描紧密聚焦的激光束绘制的线的范围从200 nm到1.7 μ m。使用高密度硝酸银的样品溶液，产生电阻率为3.48 × 10（-7）Ω m的连续银线。不仅三维微结构，如金字塔模型，但混合微结构包括聚合物和银线被证明。金属微结构的三维激光直写在电子器件和MEMS器件的三维电布线中具有潜在的应用前景。(c)2007年，美国光学学会。
Continuous silver microstructures were produced by three-dimensional (3-D) direct laser writing using a femtosecond-pulsed laser beam with polyvinylpyrrolidone (PVP) films containing silver ions. The lines drawn by scanning a tightly focused laser beam ranged from 200 nm to 1.7 mu m. Using a sample solution of high density of silver nitrate, a continuous silver line with a resistivity of 3.48 x 10(-7) Omega m was produced. Not only 3-D microstructures such as pyramidal models but also hybrid microstructures comprising polymer and silver lines were demonstrated. The 3-D direct laser writing of metallic microstructures has potential for application to 3-D electrical wiring of electronic devices and MEMS devices. (c) 2007 Optical Society of America.