Mechanical and tribological properties of multi-element (AlCrTaTiZr)N coatings
Mechanical and tribological properties of multi-element (AlCrTaTiZr)N coatings
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DOI：
10.1016/j.surfcoat.2008.01.014
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发表时间：
2008-04
影响因子：
5.4
通讯作者：
Chia-Han Lai;K. Cheng;Su-Jien Lin;J. Yeh
中科院分区：
文献类型：
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作者：
Chia-Han Lai;K. Cheng;Su-Jien Lin;J. Yeh
在Ar+ N2气氛中，采用射频反应磁控溅射法在Si和硬质合金基体上制备了多元（AlCrTaTiZr）N涂层。衬底偏压的影响，范围从0到-200 V，对这些氮化物涂层的微观结构，机械和摩擦学性能的研究。随着衬底偏压的增加，观察到N和Al的浓度降低。（AlCrTaTiZr）N涂层为B1-NaCl型面心立方晶体结构。基体偏压的使用改变了（AlCrTaTiZr）N涂层的微观结构，从在边界处具有微孔的柱到致密且不太确定的柱。宏观压应力随衬底偏压的增加从-0.9 GPa增加到-3.6 GPa。硬度和附着力在-150 V的偏压下分别增加到36.9 GPa和60.7 N的峰值。采用球-盘摩擦磨损试验机在10 N载荷下研究了（AlCrTaTiZr）N涂层与100 Cr 6钢球的摩擦学性能。随着基体偏压的增大，磨损率减小，摩擦系数基本保持在0.75。偏压为-150 V时，（AlCrTaTiZr）N涂层的磨损率最低，为3.65×10− 6 mm 3/Nm。
Multi-element (AlCrTaTiZr)N coatings are deposited onto Si and cemented carbide substrates by reactive RF magnetron sputtering in an Ar+N2mixture. The influence of substrate bias voltage, ranging from 0 to −200 V, on the microstructural, mechanical and tribological properties of these nitride coatings is studied. A reduction in concentration of N and Al is observed with increasing substrate biases. The (AlCrTaTiZr)N coatings show the face-centered-cubic crystal structure (B1–NaCl type). The use of substrate bias changes the microstructure of the (AlCrTaTiZr)N coating from the columns with microvoids in boundaries to the dense and less identified columns. The compressive macrostress increases from −0.9 GPa to −3.6 GPa with an increase of substrate bias. The hardness and adhesion increase to peak values of 36.9 GPa and 60.7 N at the bias voltage of −150 V, respectively. The tribological properties of the (AlCrTaTiZr)N coatings against 100Cr6 steel balls are evaluated by a ball-on-disc tribometer with a 10 N applied load. With an increase of substrate bias, the wear rate reduces while the friction coefficient almost keeps constant at 0.75. The lowest wear rate of 3.65×10−6mm3/Nm is obtained for the (AlCrTaTiZr)N coating deposited at the bias voltage of −150 V.