Laser-induced Forward Transfer of Ag Nanopaste.
Laser-induced Forward Transfer of Ag Nanopaste.
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DOI：
10.3791/53728
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发表时间：
2016-03-31
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影响因子：
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通讯作者：
Piqué A
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文献类型：
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作者：
Breckenfeld E;Kim H;Auyeung RC;Piqué A
在过去的十年中，用于印刷金属油墨或其他功能材料的非平版印刷方法1-3有了很大的发展。随着人们对可打印电子产品和无掩膜图案的兴趣日益增长，其中许多工艺，如喷墨打印3和激光诱导前向转移(LIFT)4，已经变得越来越流行。与更传统的半导体加工技术相比，这些添加剂制造工艺成本低、环保，非常适合快速成型。虽然大多数直写过程仅限于二维结构，不能处理高粘度的材料(特别是喷墨)，但如果操作得当，Lift可以超越这两个限制。三维像素(称为体素)的一致传输，也被称为激光贴花传输(LDT)5-9，最近已经被证明使用高粘性纳米银来制造独立的互连、复杂的体素形状和高深宽比结构。在这篇文章中，我们展示了一种简单而通用的工艺来制造各种微尺度和宏尺度的银结构。结构包括用于图案化电触点的简单形状、桥接和悬臂梁结构、高纵横比结构，以及使用商用数字微镜器件(DMD)芯片的单次发射、大面积转移。
Over the past decade, there has been much development of non-lithographic methods1-3 for printing metallic inks or other functional materials. Many of these processes such as inkjet3 and laser-induced forward transfer (LIFT)4 have become increasingly popular as interest in printable electronics and maskless patterning has grown. These additive manufacturing processes are inexpensive, environmentally friendly, and well suited for rapid prototyping, when compared to more traditional semiconductor processing techniques. While most direct-write processes are confined to two-dimensional structures and cannot handle materials with high viscosity (particularly inkjet), LIFT can transcend both constraints if performed properly. Congruent transfer of three dimensional pixels (called voxels), also referred to as laser decal transfer (LDT)5-9, has recently been demonstrated with the LIFT technique using highly viscous Ag nanopastes to fabricate freestanding interconnects, complex voxel shapes, and high-aspect-ratio structures. In this paper, we demonstrate a simple yet versatile process for fabricating a variety of micro- and macroscale Ag structures. Structures include simple shapes for patterning electrical contacts, bridging and cantilever structures, high-aspect-ratio structures, and single-shot, large area transfers using a commercial digital micromirror device (DMD) chip.