XPS study of Nb-doped oxygen sensing TiO2 thin films prepared by sol-gel method
XPS study of Nb-doped oxygen sensing TiO2 thin films prepared by sol-gel method
复制标题
DOI：
10.1016/s0040-6090(98)00534-3
复制
发表时间：
1998-08-04
期刊：
影响因子：
2.1
通讯作者：
Lamb, R
中科院分区：
文献类型：
--
作者：
Atashbar, MZ;Sun, HT;Lamb, R
采用溶胶-凝胶法制备了二氧化钛（TiO 2）薄膜，并在薄膜中掺杂氧化铌（Nb 2 O 5）用于氧传感。使用X射线光电子能谱（XPS）的所得膜传感器表面的化学组成进行了研究。膜基本上是化学计量的，其中碳作为表面处的主要杂质。已经检查了膜电阻以检测浓度为1 ppm至1%的氧。掺杂导致薄膜在低至190摄氏度的工作温度下的氧气敏感性增加40%。(C)1998年Elsevier Science S.A. All rights reserved.
Titanium dioxide (TiO2) thin films have been prepared using the sol-gel method and subsequently doped with niobium oxide (Nb2O5) for use in oxygen sensing applications. The chemical composition of the resultant film sensor surface has been investigated using X-ray pholoelectron spectroscopy (XPS). Films are essentially stoichiometric with carbon as the dominant impurity at the surface. The film electrical resistance has been examined for detection of oxygen at concentrations of 1 ppm to 1%. Doping resulted in a 40% increase in the oxygen gas sensitivity of the thin films at an operating temperature, as low as 190 degrees C. (C) 1998 Elsevier Science S.A. All rights reserved.