Fabrication and actuation of customized nanotweezers with a 25 nm gap
Fabrication and actuation of customized nanotweezers with a 25 nm gap
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DOI：
10.1088/0957-4484/12/3/322
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发表时间：
2001-09-01
期刊：
影响因子：
3.5
通讯作者：
Grey, F
中科院分区：
文献类型：
--
作者：
Boggild, P;Hansen, TM;Grey, F
将传统的硅微细加工和电子束诱导碳污染直接三维生长相结合，我们提出了一种制备间距为25 nm的纳米铲刀的方案。四个间隔为1.5微米的氧化硅悬臂梁延伸到硅支撑芯片的边缘，覆盖着一层薄金属。通过聚焦悬臂梁两端的电子束，从衬底上长出了狭窄的超级尖端。衬底的仔细对准使超级尖端会聚在一起形成纳米级的缺口。我们演示了镊臂的形状和大小的定制，使用一个简单的方案，允许方便地微调尖端特征和间隙到5 nm以内。超级尖端随后可以金属化，使其具有导电性，而不会显著影响镊子的形状。通过在外部电极上相对于内部两个电极施加电压，可以打开和闭合间隙。这使得该设备能够抓取和操纵小颗粒，并可选择对颗粒进行直接电子测量。我们的方法的优点是在镊子臂之间没有施加电压差，使该设备非常适合于有机物体等脆弱结构的应用。
By combining conventional silicon microfabrication and direct three-dimensional growth using electron-beam induced carbon contamination, we have developed a scheme for fabricating nanotweezers with a gap of 25 nm. Four silicon oxide cantilevers with a spacing of 1.5 mum extending over an edge of a silicon support chip, were covered with a thin layer of metal. By focusing an electron beam at the ends of the cantilevers, narrow supertips grew from the substrate. Careful alignment of the substrate made the supertips converge to form a nanoscale gap. We demonstrate customization of the shape and size of the tweezer arms, using a simple scheme that allows conveniently fine-tuning of the tip features and the gap to within 5 nm. The supertips can be metallized subsequently, to be made conducting, without significantly affecting the shape of the tweezers. By applying a voltage on the outer electrodes with respect to the inner two electrodes, the gap can be opened and closed. This enables the device to grab and manipulate small particles, with the option of direct electrical measurement on the particle. The advantage of our approach is that no voltage difference is applied between the tweezer arms, making the device ideal for application with such fragile structures as organic objects.