Laser decal transfer of freestanding microcantilevers and microbridges
Laser decal transfer of freestanding microcantilevers and microbridges
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DOI：
10.1007/s00339-009-5433-6
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发表时间：
2009-10
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影响因子：
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通讯作者：
R. Auyeung;H. Kim;A. Birnbaum;M. Zalalutdinov;S. Mathews;A. Piqué
中科院分区：
文献类型：
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作者：
R. Auyeung;H. Kim;A. Birnbaum;M. Zalalutdinov;S. Mathews;A. Piqué
利用激光贴花转移工艺在硅衬底沟槽上制作了独立的银微悬臂梁和微桥，而不需要使用牺牲层或后续的刻蚀工艺。采用单脉冲激光(355 nm，30 ns半高宽)，在具有15m宽沟槽的预图案化硅衬底上直接传输200 nm厚的纳米银层(宽5m×25m)。通过调整激光光斑在衬底上的位置，可以直接在沟槽上沉积7到9米长的独立式微悬臂梁或15米长的微桥。随后在250℃的烘箱固化导致银纳米颗粒的烧结，而不会对转移的形状和形式产生很大影响。激光测振实验测得微悬臂梁的真空基频为？1-2 MHz，微桥的基频为？3 MHz。微悬臂梁的Q因子平均为1500，微桥的Q因子平均为1400。总体而言，微桥的测量共振偏离了理论预测，表明了拉伸残余应力状态。
Freestanding silver microcantilevers and microbridges were fabricated over trenches in Si substrates by the laser decal transfer process without the use of sacrificial layers or subsequent etch processes. Single laser pulses (355 nm, 30 ns FWHM) were used to directly transfer 200 nm thick silver nanopaste layers (5 ?m wide×25 ?m long) over prepatterned Si substrates with 15 ?m wide trenches. By adjusting the position of the laser spot over the substrate, it was possible to directly deposit freestanding microcantilevers 7 to 9 ?m in length or 15-?m long microbridges over the trenches. Subsequent oven curing at 250°C resulted in sintering of the Ag nanoparticles without greatly affecting the shape and form of the transfers. Laser vibrometry experiments yielded fundamental resonance frequencies in vacuum of ?1–2 MHz for the microcantilevers and ?3 MHz for the microbridges. The fittedQ-factors averaged 1500 for the microcantilevers and 1400 for the microbridges. Overall, the measured resonances of the microbridges deviated from theoretical predictions in a manner suggesting a tensile residual stress state.