Optical micro encoder with sub-micron resolution using a VCSEL
Optical micro encoder with sub-micron resolution using a VCSEL
复制标题
使用 VCSEL 的具有亚微米分辨率的光学微编码器
DOI：
10.1016/s0924-4247(98)00188-5
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发表时间：
1998
影响因子：
4.6
通讯作者：
K. Yanagisawa
中科院分区：
文献类型：
--
作者：
H. Miyajima;E. Yamamoto;K. Yanagisawa
提出了一种利用垂直腔面发射激光器（VCSEL）改进的光学微编码器。为了获得两个相位正交的准正弦信号，采用了双光束VCSEL。方向传感和信号插值已经成为可能。此外，微透镜是单片集成到VCSEL，以提高分辨率。编码器芯片尺寸约为1.5 × 2.0 × 0.6 mm3。位移测量采用间距为20 μm的尺度，通过信号插值实现0.1 μm的分辨率。此外，编码器安装在一个低高度的线性舞台和特征，展示了一个可能的应用。并给出了该编码器的原型。
An improved optical micro encoder using a vertical-cavity surface-emitting laser (VCSEL) is presented in this paper. A twin-beam VCSEL is used in order to obtain two quasi-sinusoidal signals in phase quadrature. Directional sensing and signal interpolation have become possible. Also, microlenses are monolithically integrated onto the VCSEL in order to improve resolution. The encoder chip size is approximately 1.5 × 2.0 × 0.6 mm3. Displacement measurement is performed using a scale with a pitch of 20 μm, and resolution of 0.1 μm is achieved as a result of signal interpolation. Additionally, the encoder is installed into a low-height linear stage and characterized, demonstrating a possible application. A prototype of the packaged encoder is also presented.