New combined PIC-MCC approach for fast simulation of a radio frequency discharge at low gas pressure
New combined PIC-MCC approach for fast simulation of a radio frequency discharge at low gas pressure
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DOI：
10.1088/0963-0252/13/2/018
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发表时间：
2003-08
期刊：
影响因子：
--
通讯作者：
I. Schweigert;V. Schweigert
中科院分区：
文献类型：
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作者：
I. Schweigert;V. Schweigert
提出了一种新的PIC-MCC方法，用于精确、快速地模拟低气压、高密度等离子体条件下的射频放电。在氦和氩中，ccrf放电中不同电子加热模式之间的跃迁的测试计算表明与实验数据符合得很好。我们证明了高效率的组合PIC-MCC算法，特别是对于无碰撞制度的电子加热。
A new combined PIC-MCC approach is developed for accurate and fast simulation of a radio frequency discharge at low gas pressure and high density of plasma. Test calculations of transition between different modes of electron heating in a ccrf discharge in helium and argon show a good agreement with experimental data. We demonstrate high efficiency of the combined PIC-MCC algorithm, especially for the collisionless regime of electron heating.