Spherical concave mirror measurement by phase-shifting point diffraction interferometer with two optical fibers
Spherical concave mirror measurement by phase-shifting point diffraction interferometer with two optical fibers
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DOI：
10.1016/j.nima.2009.12.031
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发表时间：
2010-05
影响因子：
1.4
通讯作者：
Toshiaki Matsuura;Kazuaki Udaka;Y. Oshikane;H. Inoue;M. Nakano;K. Yamauchi;T. Kataoka
中科院分区：
文献类型：
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作者：
Toshiaki Matsuura;Kazuaki Udaka;Y. Oshikane;H. Inoue;M. Nakano;K. Yamauchi;T. Kataoka
开发了具有两根光纤的相移点衍射干涉仪（PS/PDI）。该系统由高数值孔径光学器件组成，无需使用成像光学器件即可在 CCD 上形成干涉图。通过分析干涉图的迭代方法确定纤芯的位置。通过数字全息术测量振幅和相位获得测试镜的表面图形。球面凹面镜的表面形状是在镜子的两个不同的轴向方向上测量的。两次结果之间的峰谷值之差为2nm，均方根(rms)值为0.85nm。当消除造成差异的主要原因莫尔图案时，测量精度为rms=0.15nm。该程序也可用于测量非球面镜。测量非球面镜时的测量精度预计与测量球面镜时的测量精度相同。
A phase-shifting point diffraction interferometer (PS/PDI) with two optical fibers has been developed. This system consists of high numerical aperture optics and it forms an interferogram on a CCD without using imaging optics. The positions of the fiber cores were determined by an iterative method for analyzing interferograms. The surface figure of a test mirror was obtained from the measured amplitude and phase by digital holography. The surface figure of a spherical concave mirror was measured at two different axial orientations of the mirror. The difference between the two results had a peak-to-valley value of 2nm and a root-mean-square (rms) value of 0.85nm. When the moiré pattern, which is main cause for the difference, is eliminated, the measurement accuracy has an rms=0.15nm. This procedure can also be used to measure aspherical mirrors. The measurement accuracy when measuring an aspherical mirror is expected to be the same as that when measuring a spherical mirror.