On-Wafer Terahertz Ribbon Waveguides Using Polymer–Ceramic Nanocomposites
On-Wafer Terahertz Ribbon Waveguides Using Polymer–Ceramic Nanocomposites
复制标题
使用聚合物陶瓷纳米复合材料的晶圆上太赫兹带状波导
DOI：
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发表时间：
2015
期刊：
影响因子：
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通讯作者：
P. Chahal
中科院分区：
文献类型：
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作者：
Xianbo Yang;P. Chahal
本文研究了用于太赫兹（THz）电路的薄介质带波导的设计和制作。仿真结果表明，采用高介电常数（高k）芯和低介电常数（低k）包层相结合的介质薄带波导可以实现低损耗太赫兹波传播。这种组合提供了更强的场约束，有助于减少波导弯曲处的损耗，并允许更高的密度集成。研究了两种不同的制备方法：1)自旋涂覆纳米复合薄膜的光图板和2)干式纳米复合薄膜的激光切割。纳米复合材料波导的表征是在太赫兹光谱区域的宽频率范围内进行的。各种不同波导样品的测量结果验证了模拟结果，并证明了聚合物陶瓷纳米复合薄带波导可以实现低成本的片级平面太赫兹集成电路。
This paper investigates the design and fabrication of thin dielectric ribbon waveguides for terahertz (THz) circuit applications. Simulations indicate that dielectric thin ribbon waveguides provide low loss THz wave propagation when a combination of high dielectric constant (high-k ) core and low dielectric constant (low-k ) cladding are used. This combination provides stronger field confinement which helps in reducing losses at waveguide bends and allows higher density integration. Two different fabrication approaches are investigated: 1) photopatterning of spin coated nanocomposite thin films and 2) laser cutting of dry nanocomposite thin films. Characterization of nanocomposites-based waveguides is carried out over a wide frequency range in the THz spectral region. Measurements of a variety of different waveguide samples validate the simulated results and prove that low cost, wafer-level planar THz integrated circuits can be realized with polymer ceramic nanocomposite thin ribbon waveguides.