Study on silicon device of microrobot system for heterogeneous integration
Study on silicon device of microrobot system for heterogeneous integration
复制标题
异构集成微型机器人系统硅器件研究
DOI：
10.23919/icep.2018.8374664
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发表时间：
2018
期刊：
影响因子：
--
通讯作者：
K. Pister
中科院分区：
文献类型：
--
作者：
Ken Saito;D. Contreras;Y. Takeshiro;Y. Okamoto;Y. Nakata;Taisuke Tanaka;S. Kawamura;M. Kaneko;F. Uchikoba;Y. Mita;K. Pister
理想的微型机器人是毫米大小的，集成了执行器、电源、传感器和控制器。许多研究人员从昆虫身上获得灵感，进行机械或电气设计，以构建小型机器人系统。在此之前，作者提出并展示了微型机器人，它可以复制蚂蚁的三脚架步态运动，腿由形状记忆合金驱动器驱动。形状记忆合金提供了大的变形和大的力，但是驱动单个腿的功耗高达94 mW。本文介绍了一种用于机器人腿部的低功耗硅静电蠕动电机芯片，该芯片采用小型电源。尺蠖电机芯片采用静电电机驱动。与形状记忆合金作动器相比，其功耗仅为1.0mW。尺蠖电机芯片的往复运动由硅光伏电池提供动力。结果表明，7.5平方毫米大小的光伏电池可以产生60 V驱动尺蠖电机芯片。产生的力足以移动微型机器人的腿。我们已经证明了使用静电尺蠖电机芯片的microrobot腿的驱动。该结果是静电马达驱动片外结构的第一个实例。
The ideal microrobots are millimeter sized with integrated actuators, power sources, sensors, and controllers. Many researchers take the inspiration from insects for the mechanical or electrical designs to construct small sized robotic systems. Previously, the authors proposed and demonstrated microrobots which can replicate the tripod gait locomotion of an ant and the legs were actuated by shape memory alloy actuators. Shape memory alloy provided a large deformation and a large force, but the power consumption was as high as 94 mW to actuate a single leg. This paper discusses the silicon electrostatic inchworm motor chip with low energy consumption for the robot leg by using a small-size power source. The inchworm motor chip has actuated by electrostatic motors. The power consumption is low as 1.0 mW compering with shape memory alloy actuators. The reciprocal motion of the inchworm motor chip is power by the silicon photovoltaic cells. Results show the 7.5 mm square size photovoltaic cells could produce 60 V to actuate the inchworm motor chip. The generated force is enough to move the leg of the microrobot. We have shown actuation of the microrobot leg using an electrostatic inchworm motor chip. This result is the first instance of an electrostatic motor driving an off-chip structure.
影响因子：
2.7
作者：
Donald, BR;Levey, CG;Rus, D
通讯作者：
Rus, D