Fatigue Properties of (100)/(001) and (111) Oriented Pb(Zr, Ti)O3 Thin Film Capacitors
Fatigue Properties of (100)/(001) and (111) Oriented Pb(Zr, Ti)O3 Thin Film Capacitors
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(100)/(001)和(111)取向Pb(Zr,Ti)O3薄膜电容器的疲劳性能
DOI：
10.1143/jjap.41.l1312
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发表时间：
2002
影响因子：
1.5
通讯作者：
J. Cross
中科院分区：
文献类型：
--
作者：
M. Tsukada;M. Mushiga;J. Watanabe;J. Cross
采用化学溶液沉积法（CSD）制备了（111）和（100）/（001）取向的Pb（Zr，Ti）O3（PZT）薄膜电容器。（100）/（001）取向的PZT在Pt和Ir底电极上沉积有薄的PbTiO 3（PT）缓冲层。（100）/（001）取向的PZT电容器的初始可切换极化（Qsw）低于（111）取向的PZT电容器。在IrO 2/PZT[（100）/（001）]/Ir电容器的情况下，5.8×109次疲劳循环后的Qsw比初始值高1.6倍。而（100）/（001）取向PZT电容器的初始和5.8×109次循环后的磁滞回线几乎相同。疲劳试验期间观察到的Qsw增加在疲劳试验后逐渐降低。结果表明，（100）/（001）取向的PZT电容器是由疲劳脉冲串脉冲极化的。结果，Qsw在测量期间增加，然而，在疲劳测试完成后，它随着时间的推移而减小。这种现象是过渡的、亚稳态的。
The (111) and (100)/(001) oriented Pb(Zr, Ti)O3 (PZT) thin film capacitors were prepared by chemical solution deposition (CSD) method. The (100)/(001) oriented PZT was deposited with thin PbTiO3 (PT) buffer layer on Pt and Ir bottom electrodes. The initial switchable polarization (Qsw) of (100)/(001) oriented PZT capacitors were lower than that of (111) oriented PZT capacitors. In the case of IrO2/PZT[(100)/(001)]/Ir capacitors, the Qsw after 5.8×109 fatigue cycles was 1.6 times higher than the initial value. However the hysteresis loops of the initial and after 5.8×109 cycles of (100)/(001) oriented PZT capacitors were almost same. An increased Qsw observed during fatigue test gradually decreased after the fatigue test. It appeared that the (100)/(001) oriented PZT capacitors were pulse poled by fatigue pulse trains. As a result, Qsw increased during the measurements, however, it decreased with the lapse of time after fatigue test was completed. Such phenomenon was transitional and metastable.