Complex Permittivity and Uncertainty Evaluations for an Ultrathin Photosensitive Insulator Film Using a Millimeter Wave Circular Cavity Resonator
Complex Permittivity and Uncertainty Evaluations for an Ultrathin Photosensitive Insulator Film Using a Millimeter Wave Circular Cavity Resonator
复制标题
使用毫米波圆腔谐振器对超薄光敏绝缘体薄膜进行复介电常数和不确定度评估
DOI：
10.1109/apmc52720.2021.9661632
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发表时间：
2021
期刊：
影响因子：
--
通讯作者：
Kogami Yoshinori
中科院分区：
文献类型：
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作者：
Shimizu Takashi;Takahagi Kouhei;Ebisawa Kazuaki;Kogami Yoshinori
功能性和紧凑型 5G / 6G 无线设备需要厚度低于 10 μm 的超薄介电薄膜及其精确的复介电常数。毫米波超薄膜复介电常数的精确测量仍然是一个很大的挑战。提出了毫米波频段基于谐振器法的超薄膜复介电常数测量技术。结果，厚度为5μm至17μm的感光膜的复介电常数在30GHz至100GHz的频率范围内表征。此外，通过不确定性分析阐明了精确超薄膜测量的要点和未来的任务。
An ultrathin dielectric film having thickness under 10 μm and its accurate complex permittivity require for functional and compact 5G / 6G wireless devices. Precise measurement of millimeter wave complex permittivity for the ultrathin film is still quite a challenge. Complex permittivity measurement technique for the ultrathin film based on a resonator method is proposed in millimeter wave frequency band. As a result, complex permittivity of photosensitive films with a thickness of 5 μm to 17 μm is characterized in the frequency range from 30 GHz to 100 GHz. Furthermore, the important points and future tasks for accurate ultrathin film measurements are clarified through the uncertainty analysis.