Uncooled, very sensitive bolometer using a doubly clamped microelectromechanical beam resonator for terahertz detection
Uncooled, very sensitive bolometer using a doubly clamped microelectromechanical beam resonator for terahertz detection
复制标题
使用双钳位微机电光束谐振器进行太赫兹检测的非冷却、非常灵敏的测辐射热计
DOI:
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发表时间:
2016
期刊:
影响因子:
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通讯作者:
and K. Hirakawa
中科院分区:
文献类型:
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作者:
Y. Zhang;Y. Watanabe;S. Hosono;N. Nagai;and K. Hirakawa