Aberrations in high aperture conventional and confocal imaging systems.
Aberrations in high aperture conventional and confocal imaging systems.
复制标题
DOI：
10.1364/ao.27.004782
复制
发表时间：
1988-11
期刊：
影响因子：
1.9
通讯作者：
C. Sheppard
中科院分区：
文献类型：
--
作者：
C. Sheppard
本文讨论了高数值孔径光学系统象差函数展开式的一种适当形式。讨论了像差、大口径、有限菲涅耳数、系统结构和表面倾斜对共焦成像系统离焦信号的影响。
An appropriate form for the expansion of an aberration function for an optical system of high numerical aperture is considered. The effects on the defocus signal of a confocal imaging system of aberrations, high aperture, finite Fresnel number, system configuration, and surface tilt are discussed.