Stiction of a Nano-Beam with Surface Effect
Stiction of a Nano-Beam with Surface Effect
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DOI：
10.1088/0256-307x/28/11/116201
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发表时间：
2011-11
影响因子：
3.5
通讯作者：
Jianlin Liu;R. Xia;Yueting Zhou
中科院分区：
文献类型：
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作者：
Jianlin Liu;R. Xia;Yueting Zhou
纳米线粘滞是制约M/NEMS器件发展的重要瓶颈。提出了一种同时考虑表面弹性和表面残余应力的纳米梁粘贴在基板上的模型。临界剥离长度可以由横截面条件用变分方法推导出来。详细讨论了表面参数对纳米束附着力的影响。这些分析为工程师设计和制造更精确的M/NEMS仪器提供了一些建议。
Nanowire stiction is a crucial bottleneck for the development of M/NEMS devices. We present a model of a nano-beam stuck to the substrate in consideration of both surface elasticity and residual surface stress. The critical detachment length can be derived from the transversality condition using the variational method. The effects of the surface parameters on the adhesion of the nano-beam are discussed in detail. These analyses provide some suggestions for engineers in the design and fabrication of more accurate M/NEMS instruments.