Development of dual-focus scanning internal photoemission microscopy for mapping of both top and rear surfaces of 3C-SiC layers
Development of dual-focus scanning internal photoemission microscopy for mapping of both top and rear surfaces of 3C-SiC layers
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开发用于 3C-SiC 层顶面和后表面测绘的双焦点扫描内部光电显微镜
DOI:
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发表时间:
2017
期刊:
影响因子:
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通讯作者:
and M. Kato
中科院分区:
文献类型:
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作者:
K. Shiojima;N. Ichikawa;and M. Kato