MOVPE growth of nitrogen- and aluminum-polar AlN on 4H-SiC
MOVPE growth of nitrogen- and aluminum-polar AlN on 4H-SiC
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DOI:
10.1016/j.jcrysgro.2018.02.020
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发表时间:
2018-04
影响因子:
1.8
通讯作者:
J. Lemettinen;H. Okumura;I. Kim;M. Rudziński;J. Grzonka;T. Palacios;S. Suihkonen
中科院分区:
文献类型:
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作者:
J. Lemettinen;H. Okumura;I. Kim;M. Rudziński;J. Grzonka;T. Palacios;S. Suihkonen