Development of Nanometer Positioning System Driven by Force Operational Water Hydraulic Actuator with Rigid Slide Guide-way, Simulation and Experimental Evaluation of Non-linear Positioning Characteristics
Development of Nanometer Positioning System Driven by Force Operational Water Hydraulic Actuator with Rigid Slide Guide-way, Simulation and Experimental Evaluation of Non-linear Positioning Characteristics
复制标题
刚性滑动导轨力操作水压执行器驱动的纳米定位系统开发及非线性定位特性仿真与实验评估
DOI：
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发表时间：
2001
期刊：
影响因子：
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通讯作者：
et ell
中科院分区：
文献类型：
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作者：
Tsukahara;S.;et ell
