Micromachined particle filter with low power dissipation
Micromachined particle filter with low power dissipation
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DOI：
10.1115/1.1399285
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发表时间：
2001-12-01
影响因子：
2
通讯作者：
Tai, YC
中科院分区：
文献类型：
--
作者：
Yang, JM;Ho, CM;Tai, YC
利用微电子机械系统(MEMS)制造技术，设计并制作了微米级气载生物制剂收集用微过滤器。微过滤器的厚度范围为1微米-3微米，孔径范围为5微米-12微米。在实验和数值研究之间进行迭代，以获得具有低压降的高效微过滤器设计。实现了粘性功耗两个数量级的降低。首先通过数值模拟推导出了低雷诺数范围内的滤波器设计准则。高度准确地测量轮胎的三维(3-D)几何侧壁轮廓和微米大小的孔洞直径，对于验证和修改设计规则至关重要。在测试的努森数范围内，表面滑移的影响很小。
Microfilters for collecting micron-size airborne biological agents are designed and fabricated using a micro-electro-mechanical-system (MEMS) fabrication technology. The thickness of the microfilter ranges from 1 mum-3 mum, and the hole diameter from 5 mum-12 mum. Iterations between experimental and numerical studies are carried out to attain efficient microfilter designs with low, pressure drop. Two orders of magnitude reduction of viscous power consumption have been achieved. A design rule of the filter in a low Reynolds-number range was first derived from numerical simulations. Highly, accurate measurements of the three-dimensional (3-D) geometry side-wall profile, and diameter of the micron-size holes tire critical in validating and modifying the design rule. The effect of the surface slip is found to be small in the tested Knudsen-number range.