A Kirigami MEMS Velocity Acoustic Transducer
A Kirigami MEMS Velocity Acoustic Transducer
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Kirigami MEMS 速度声学传感器
DOI：
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发表时间：
2021
期刊：
影响因子：
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通讯作者：
C. Lee
中科院分区：
文献类型：
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作者：
S. Oh;B. Davaji;J. Richie;A. Lal;C. Lee
制造并表征了一种小型化带式麦克风（kirigami麦克风）。具有低弹簧常数的麦克风显示出高达60 kHz的平坦频率响应。低弹簧常数是由于丝带上的波纹。由于带（200 nm厚的PECVD氮化硅膜）的超低质量，对声压的瞬态响应比商用动圈麦克风快120 μ s。kirigami麦克风还显示了低振幅下声压的更多细节。
A miniaturized ribbon microphone, a kirigami microphone, is fabricated and characterized. The microphone with a low-spring constant shows a flat frequency response up to 60 kHz. The low-spring constant is due to corrugation on the ribbon. Owing to the ultra-low mass of the ribbon (200 nm thick PECVD silicon nitride film), the transient response to sound pressure is $120\ \mu\mathrm{s}$ faster than a commercial dynamic microphone. The kirigami microphone also shows more details of sound pressure at low amplitudes.