Ultimate pressure of the order of 10-13 Torr in an aluminum alloy vacuum chamber
Ultimate pressure of the order of 10-13 Torr in an aluminum alloy vacuum chamber
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铝合金真空室内的极限压力约为 10-13 Torr
DOI：
10.1116/1.575916
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发表时间：
1989
期刊：
影响因子：
--
通讯作者：
H. Ishimaru
中科院分区：
文献类型：
--
作者：
H. Ishimaru
制造并测试了用于超高真空计校准的极高真空室。腔室内径为 250 毫米，长 1800 毫米。它有 20 个仪表端口，内部有一个液氮护罩，可抑制仪表之间的干扰，并避免由于仪表热辐射而导致压力升高。真空室由特殊挤压铝合金 A6063-T6-EX 在氧气和氩气气氛中制成。该室是在氩气气氛中使用钨极惰性气体焊接来组装的。在 150°C 下烘烤 24 小时后，获得了 10−13 Torr l/s cm2 数量级的特定脱气速率。使用涡轮增压 300 l/s 涡轮分子泵对系统进行抽空。极高的真空由两个 300 l/s 溅射离子泵和一个带液氮护罩的钛升华泵维持。这些泵也由铝合金制成。使用带有球形阳极的点收集器测量了 3×10−13 Torr 的极限压力。残余气体分析...
An extremely high vacuum chamber for the calibration of ultrahigh vacuum gauges was fabricated and tested. The chamber has an inner diameter of 250 mm and is 1800 mm long. It has 20 gauge ports and a liquid‐nitrogen shroud inside to suppress interference between gauges and to avoid pressure rise due to thermal radiation from the gauges. The vacuum chamber was made of specially extruded aluminum alloy A6063‐T6‐EX in an oxygen and argon atmosphere. The chamber was assembled using tungsten inert gas welding in an argon atmosphere. After a bakeout at 150 °C for 24 h, a specific outgassing rate of the order of 10−13 Torr l/s cm2 was obtained. The system was evacuated with a turbobacked 300 l/s turbomolecular pump. The extremely high vacuum is maintained by two 300 l/s sputter ion pumps and a titanium sublimation pump with a liquid‐nitrogen shroud. These pumps are also made of aluminum alloys. An ultimate pressure of 3×10−13 Torr was measured with a point collector gauge with spherical anode. Residual gas analy...