Analysis of scanning probe used for simultaneous measurement of tunneling current and surface potential

Analysis of scanning probe used for simultaneous measurement of tunneling current and surface potential
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隧道电流与表面电位同步测量扫描探针分析

DOI:
10.1063/1.371796
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发表时间:
1999
影响因子:
3.2
通讯作者:
M. Iwamoto
M. Iwamoto
中科院分区:
物理与天体物理3区
文献类型:
--
作者:
Y. Oyama;Y. Majima;M. Iwamoto

文献摘要

被引文献

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分析了同时测量隧道电流和表面电位的扫描探针显微镜。假设振动针尖为半径为r的球形电极,用电镜像法计算了振动针尖与平面样品之间的电容。得到了位移电流和电容的表达式。讨论了TSM的分辨率,并得出结论,位移电流模式的横向分辨率优于尖端半径r的五分之一,当r=5 μm时,约为1 μ m。 最后,通过比较位移电流与平面样品之间的理论关系,实验确定了针尖与平面样品之间的距离以及针尖半径。
The scanning probe microscope used for the simultaneous measurement of tunneling current and surface potential (TSM) is analyzed. Using an electric image method, the capacitance formed between the vibrating tip and plane sample is calculated, assuming that the vibrating tip is a sphere electrode with a radius r. The formula expressing the displacement current and the capacitance is obtained. The resolution of the TSM is discussed, and concluded that the lateral resolution of the displacement current mode is better than one fifth of the tip radius r, e.g., about 1 μm for r=5 μm. Finally, the distance between the tip and plane sample, and the tip radius were experimentally determined by comparing the theoretical relationship between the displacement current and the distance.