Fabrication of Hydrophobic Nanostructured Surfaces for Microfluidic Control
Fabrication of Hydrophobic Nanostructured Surfaces for Microfluidic Control
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DOI：
10.2116/analsci.32.79
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发表时间：
2016-01-01
影响因子：
1.6
通讯作者：
Tsukahara, Takehiko
中科院分区：
文献类型：
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作者：
Morikawa, Kyojiro;Tsukahara, Takehiko
在微米和纳米流体领域，已经开发出了各种新型器件。对于这类器件，不仅需要对微/纳米通道进行流体控制，而且还需要对其表面进行控制。近年来，疏水纳米结构表面对流体的控制引起了人们的广泛关注。然而，传统的纳米结构制备方法需要复杂的步骤，而将纳米结构集成到微/纳米通道中使得制造过程变得更加困难和复杂。在本研究中，开发了一种简单、容易地将纳米结构集成到微通道中的制备方法。通过改变等离子体刻蚀时间和用碱性溶液刻蚀的方法，成功地制备了不同尺寸的纳米结构。此外，事实证明，构建高度疏水的纳米结构表面是可能的，可以在设计的压力下有效地控制微通道中的流体。我们相信，本文开发的制备方法和所获得的结果对微米和纳米流体领域的进一步应用是有价值的贡献。
In the field of micro- and nanofluidics, various kinds of novel devices have been developed. For such devices, not only fluidic control but also surface control of micro/nano channels is essential. Recently, fluidic control by hydrophobic nanostructured surfaces have attracted much attention. However, conventional fabrication methods of nanostructures require complicated steps, and integration of the nanostructures into micro/nano channels makes fabrication procedures even more difficult and complicated. In the present study, a simple and easy fabrication method of nanostructures integrated into microchannels was developed. Various sizes of nanostructures were successfully fabricated by changing the plasma etching time and etching with a basic solution. Furthermore, it proved possible to construct highly hydrophobic nanostructured surfaces that could effectively control the fluid in microchannels at designed pressures. We believe that the fabrication method developed here and the results obtained are valuable contributions towards further applications in the field of micro- and nanofluidics.