High-$Q$ Narrowband Tunable Combline Bandpass Filters Using MEMS Capacitor Banks and Piezomotors
High-$Q$ Narrowband Tunable Combline Bandpass Filters Using MEMS Capacitor Banks and Piezomotors
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DOI：
10.1109/tmtt.2012.2226601
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发表时间：
2013
影响因子：
4.3
通讯作者：
S. Fouladi;F. Huang;W. D. Yan;R. Mansour
中科院分区：
文献类型：
--
作者：
S. Fouladi;F. Huang;W. D. Yan;R. Mansour
本文介绍了一种新型的基于电子调谐的可调谐带通滤波器的设计和实现，该滤波器采用射频微机电系统（RF- mems）电容器组，并采用压电电机进行机械调谐。使用微机电系统调谐电路，可以紧凑地实现高q和接近零直流功耗的滤波器。所提出的滤波器结构由带有调谐盘的组合谐振器组成，调谐盘可以使用压电马达机械移动，也可以装载RF-MEMS电容器组。基于所提出的调谐概念，设计并测量了二极和六极可调谐带通滤波器。双极可调谐滤波器工作在2.5 GHz，带宽为22 MHz，调谐范围为110 MHz，而质量因子优于374（调谐范围为1300-374）。具有RF-MEMS电容器组的六极可调谐滤波器工作范围为2.634至2.59 GHz （44 mhz调谐范围）。所提出的可调谐滤波器结构也可以使用替代技术，如钡-锶-钛酸盐调节剂来实现。
This paper presents the design and implementation of a new class of evanescent tunable combline bandpass filters based on electronic tuning with the use of RF microelectromechanical systems (RF-MEMS) capacitor banks and also mechanical tuning using piezomotors. The use of microelectromechanical systems tuning circuit results in compact implementation of the proposed filters with high-Q and near to zero dc power consumption. The proposed filter structures consist of combline resonators with tuning disks that are either mechanically moveable using piezomotors or are loaded with RF-MEMS capacitor banks. Two- and six-pole tunable bandpass filters are designed and measured based on the proposed tuning concept. The two-pole tunable filter operates at 2.5 GHz with a bandwidth of 22 MHz and demonstrates a tuning range of 110 MHz, while the quality factor is better than 374 (1300-374 over the tuning range). The six-pole tunable filter with RF-MEMS capacitor banks operates from 2.634 to 2.59 GHz (44-MHz tuning range). The proposed tunable filter structures can also be implemented using alternative technologies such as barium-strontium-titanate varactors.