Comparative Study on Formation of Boride Thin Films Deposited by Co-sputtering with Molybdenum

Comparative Study on Formation of Boride Thin Films Deposited by Co-sputtering with Molybdenum
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钼共溅射硼化物薄膜形成的对比研究

DOI:
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发表时间:
2022
期刊:
Proceedings of ICRP-11/GEC2022
影响因子:
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通讯作者:
and Takeru Okada
and Takeru Okada
中科院分区:
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文献类型:
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作者:
Kazuki Nashimoto;Yoshiko Horiguchi;Akichika Kumatani;and Takeru Okada

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