Enhanced measurement of steep surfaces by slope-adapted sensor tilting
Enhanced measurement of steep surfaces by slope-adapted sensor tilting
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DOI：
10.1088/0957-0233/23/7/074007
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发表时间：
2012-07
影响因子：
2.4
通讯作者：
A. Weckenmann;A. Schuler;R. J. B. Ngassam
中科院分区：
文献类型：
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作者：
A. Weckenmann;A. Schuler;R. J. B. Ngassam
在触觉表面探测领域中，探测尖端与表面之间的接触点随局部表面斜率的不同而不同。在2.5D系统的情况下，如轮廓仪或原子力显微镜，高斜率的测量会导致很大的偏差。因此，研究了一种探测原理，即应用依赖于表面斜率的传感器尖端旋转来保持与被测表面的垂直方向。为了实现倾斜系统，需要确定每个表面点的最佳尖端旋转角。可能的策略可以基于具有预先扫描的表面的先验知识的两遍扫描、具有已经获取的表面点的动态外推的单遍扫描或与多种策略的组合。为了确定最合适的策略和最佳算法，开发了一个仿真和分析环境。这项工作的重点是策略的开发和仿真。
In the field of tactile surface probing, the contact point between the probing tip and the surface varies depending on the local surface slope. In the case of 2.5D systems such as profilometers or atomic force microscopes, the measurement of high slopes leads to large deviations. Therefore a probing principle is investigated that applies a surface slope-dependent sensor tip rotation to maintain an orthogonal orientation to the measured surface. To realize the tilting system, strategies are necessary to determine the optimal tip rotation angle for each surface point. Possible strategies can be based on a two-pass scan with a priori knowledge of the surface with a pre-scan, a single-pass scan with dynamic extrapolation of already acquired surface points or a combination with multiple strategies. To determine the most suitable strategies and the best algorithms a simulation and analysis environment was developed. The focus of this work is the development and simulation of the strategies.