Strict control of grain size in Co–Cr–Ta recording layer for longitudinal magnetic media by intermittently depositing Cr underlayer
Strict control of grain size in Co–Cr–Ta recording layer for longitudinal magnetic media by intermittently depositing Cr underlayer
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DOI：
10.1063/1.372702
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发表时间：
2000-04
影响因子：
3.2
通讯作者：
T. Fukuda;S. Nakagawa;M. Naoe
中科院分区：
文献类型：
--
作者：
T. Fukuda;S. Nakagawa;M. Naoe
采用10 nm厚的铬单元层间歇沉积技术，改善了沉积在铬底层上的Co-Cr-Ta记录层的结构和磁性能。铬层由10 nm厚的铬单元层组成，每隔3min间歇沉积一次，或在每一单元层之间以10 S的氮气流量间歇沉积，以防止铬微晶的生长。间歇沉积铬底层使Co-Cr-Ta记录层的<D>Cr(200)晶面尺寸减小，并增加了Co-Cr-Ta记录层的矫顽力Hc。氮气流动降低了铬底层的结晶度，降低了记录层的HC∥。
The intermittent deposition technique using 10-nm-thick Cr unit layers was performed to improve structural and magnetic characteristics of the Co–Cr–Ta recording layer deposited on the Cr underlayers. The Cr layers were composed of 10-nm-thick Cr unit layers intermittently deposited at intervals of 3 min or with N2 flow for 10 s between the depositions of each unit layer, in order to prevent the growth of Cr crystallites. The intermittent deposition of the Cr underlayers decreased in crystallite size 〈D〉Cr(200) and increased the coercivity Hc of the Co–Cr–Ta recording layer. N2 flow degraded the crystalinity of the Cr underlayer and decreased Hc∥ of the recording layer.