Displacement Measurement With a Self-Sensing MEMS Electrostatic Drive
Displacement Measurement With a Self-Sensing MEMS Electrostatic Drive
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DOI：
10.1109/jmems.2014.2314296
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发表时间：
2014-04
影响因子：
2.7
通讯作者：
S. Moore;S. Moheimani
中科院分区：
文献类型：
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作者：
S. Moore;S. Moheimani
这封信概述了应用于微机电系统 (MEMS) 静电驱动的同步驱动和位移传感技术。使用相同的静电驱动器进行驱动和传感，可以将更多的芯片空间专用于静电驱动器，从而提高这两种功能的有效转换效率并简化机械设计。通过将驱动器集成到 LC 振荡器中来实现电容测量，从而执行位移传感。这提供了从位移到电容到频率到电压的映射。该技术应用于 MEMS 纳米定位器，并且传感器在设备的带宽范围内没有表现出动态。传感器的灵敏度为 0.7551 V μm-1，位移本底噪声为 0.00836 nmrms/√Hz。
This letter outlines a simultaneous actuation and displacement sensing technique applied to a microelectromechanical system (MEMS) electrostatic drive. Using the same electrostatic drive for both actuation and sensing allows more die space to be dedicated to the electrostatic drive, increasing the effective transduction efficiency of both functions and simplifying the mechanical design. Displacement sensing is performed with capacitive measurement implemented by incorporating the drive into an LC oscillator. This provides the mapping from displacement-to-capacitance to frequency-to-voltage. The technique was applied to a MEMS nanopositioner and the sensor exhibited no dynamics over the bandwidth of the device. The sensitivity of the sensor was 0.7551 V μm-1 and had a displacement noise floor of 0.00836 nmrms/√Hz.