T.Shimura, I.Takahashi, J.Harada, and M.Umeno: "X-ray diffraction evidence for crystalline SiO_2 in thermal oxide layrs on Si substrate" The Physics and Chemistry of SiO_2 and the Si-SiO_2 Interface 3. 96-1. 456-467 (1996)
T.Shimura, I.Takahashi, J.Harada, and M.Umeno: "X-ray diffraction evidence for crystalline SiO_2 in thermal oxide layrs on Si substrate" The Physics and Chemistry of SiO_2 and the Si-SiO_2 Interface 3. 96-1. 456-467 (1996)
复制标题
T.Shimura、I.Takahashi、J.Harada 和 M.Umeno:“Si 基板上热氧化物层中结晶 SiO_2 的 X 射线衍射证据”The Chemistry of SiO_2 and the Si-SiO_2 Interface 3. 96-
DOI:
--
复制
发表时间:
--
期刊:
影响因子:
--
通讯作者:
中科院分区:
文献类型:
--
作者: