Application of liftoff low‐temperature‐grown GaAs on transparent substrates for THz signal generation

Application of liftoff low‐temperature‐grown GaAs on transparent substrates for THz signal generation
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透明基板上剥离低温生长砷化镓的应用用于太赫兹信号产生

DOI:
10.1063/1.117357
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发表时间:
1996
影响因子:
4
通讯作者:
K. Ploog
K. Ploog
中科院分区:
物理与天体物理2区
文献类型:
--
作者:
H. Heiliger;M. Vosseburger;H. Roskos;H. Kurz;R. Hey;K. Ploog

文献摘要

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采用低温生长GaAs(LT-GaAs)的外延剥离(ELO)在光学透明衬底上制备用于太赫兹应用的(亚)皮秒光电导开关。选择玻璃作为晶圆上探针的衬底,而选择蓝宝石作为自由空间天线。
Epitaxial liftoff (ELO) of low‐temperature‐grown GaAs (LT‐GaAs) is employed to fabricate (sub)picosecond photoconductive switches on optically transparent substrates for THz applications. Glass is selected as a substrate for on‐wafer probes while sapphire is chosen for free‐space antennas.