High-performance temperature-programmed microfabricated gas chromatography columns
High-performance temperature-programmed microfabricated gas chromatography columns
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DOI：
10.1109/jmems.2005.856648
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发表时间：
2005-10-01
影响因子：
2.7
通讯作者：
Wise, KD
中科院分区：
文献类型：
--
作者：
Agah, M;Potkay, JA;Wise, KD
本文报道了高性能，硅玻璃微气相色谱（μ GC）柱集成加热器和温度传感器的温度编程，和集成的压力传感器的流量控制的第一个发展。这些3米长，150 μ m宽，250 μ m深的列，集成在一个3.3平方厘米的模具，制造使用硅玻璃溶解晶片工艺。演示的贡献，从传导，对流和辐射的散热与封装和不封装，它表明，使用7.5毫米高气压封装降低功耗约650毫瓦，在100摄氏度，而真空封装降低稳态功率要求小于100毫瓦。在真空条件下，需要600 mW的温度编程速率为40摄氏度/分钟。温度传感器的2300 ppm/摄氏度的TCR和压力传感器的50 fF/kPa的灵敏度满足要求，以实现在μ GC系统中的重现性分离。使用这些列，高分辨率的20个组分的分离，获得了分析时间是一个因素的两倍，比等温响应快。
This paper reports the first development of high-performance, silicon-glass micro-gas chromatography (mu GC) columns having integrated heaters and temperature sensors for temperature programming, and integrated pressure sensors for flow control. These 3-m long, 150-mu m wide and 250-mu m deep columns, integrated on a 3.3 cm square die, were fabricated using a silicon-on-glass dissolved wafer process. Demonstrating the contributions to heat dissipation from conduction, convection, and radiation with and without packaging, it is shown that using a 7.5-mm high atmospheric pressure package reduces power consumption to about 650 mW at 100 degrees C, while vacuum packaging reduces the steady-state power requirements to less than 100 mW. Under vacuum conditions, 600 mW is needed for a temperature-programming rate of 40 degrees C/ min. The 2300 ppm/degrees C TCR of the temperature sensors and the 50 fF/kPa sensitivity of the pressure sensors satisfy the requirements needed to achieve reproducible separations in a mu GC system. Using these columns, highly resolved 20-component separations were obtained with analysis times that are a factor of two faster than isothermal responses.