Surface acoustic wave atomizer with pumping effect
Surface acoustic wave atomizer with pumping effect
复制标题
具有泵浦效应的表面声波雾化器
DOI：
10.1109/memsys.1995.472559
复制
发表时间：
1995
期刊：
影响因子：
--
通讯作者：
T. Higuchi
中科院分区：
文献类型：
--
作者：
M. Kurosawa;Takayuki Watanabe;T. Higuchi
我们提出了一种用于超声雾化器小型化和功能系统构建的表面声波装置。实际上，超声波雾化器比其他方法要小得多，所以便于携带的雾化器采用的是超声波振动。但对于口袋或内窥镜来说，它们太大了。用声表面波雾化装置进行了初步试验，得到了尺寸可装在口袋中的细雾。作为一个系统，这种功能装置能够将尺寸缩小到毫米级。雾化器由振动器、盖子和管子组成。振子和盖子材料为127.8“Y-Cut LiNbO，产生表面声波瑞利波。瑞利波是泵浦效应和雾化效应的驱动力。泵浦效应是由弹性材料的波动和流体的粘性引起的，就像超声波马达一样。雾化速度随驱动电压而变化。最大雾化速度约为0.1ml/min，平均直径为19Ym。
We propose a surface acoustic wave device for miniaturization of ultrasonic atomizers and for functional system construction. Actually, ultrasonic atomizers are rather smaller than other method, so that nebulizers which are handy to carry type use ultrasonic vibration. But they are to large for a pocket or an endoscope. We have obtained a fine mist with a first trial of surface acoustic wave atomizing device whose dimensions are pocketable size. This functional device is able to reduce the dimensions to mm-order as a system. The atomizer consists of a vibrator, a cover and a tube. The vibrator and cover material is 127.8" Y-cut LiNbO, to generate Rayleigh wave, a kind of surface acoustic wave. The Rayleigh wave is the driving force of pumping effect and atomizing effect. The pumping effect is caused by the wave motion of the elastic material and viscosity of the fluid like an ultrasonic motor. The atomizing rate varied according to the driving voltage. The maximum rate was about 0.1 ml per minute. The mean diameter was 19 ym.