Analyses of the plasma generated by laser irradiation on sputtered target for determination of the thickness used for plasma generation.
Analyses of the plasma generated by laser irradiation on sputtered target for determination of the thickness used for plasma generation.
复制标题
分析激光照射溅射靶材产生的等离子体,以确定用于等离子体产生的厚度。
DOI:
10.1063/1.4862660
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发表时间:
2014
期刊:
影响因子:
--
通讯作者:
M. Washio
中科院分区:
文献类型:
--
作者:
M. Kumaki;S. Ikeda;Y. Fuwa;D. Cinquegrani;M. Sekine;N. Munemoto;T. Kanesue;M. Okamura;M. Washio
In Brookhaven National Laboratory, laser ion source has been developed to provide heavy ion beams by using plasma generation with 1064 nm Nd:YAG laser irradiation onto solid targets. The laser energy is transferred to the target material and creates a crater on the surface. However, only the partial material can be turned into plasma state and the other portion is considered to be just vaporized. Since heat propagation in the target material requires more than typical laser irradiation period, which is typically several ns, only the certain depth of the layers may contribute to form the plasma. As a result, the depth is more than 500 nm because the base material Al ions were detected. On the other hand, the result of comparing each carbon thickness case suggests that the surface carbon layer is not contributed to generate plasma.
影响因子:
1.6
作者:
M. Okamura;H. Kashiwagi;K. Sakakibara;J. Takano;T. Hattori;N. Hayashizaki;R. Jameson;K. Yamamoto
通讯作者:
M. Okamura;H. Kashiwagi;K. Sakakibara;J. Takano;T. Hattori;N. Hayashizaki;R. Jameson;K. Yamamoto