Introduction to applications and industries for microelectromechanical systems (MEMS)

Introduction to applications and industries for microelectromechanical systems (MEMS)
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DOI：
10.1109/test.2003.1270896
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发表时间：
2003-09
期刊：
International Test Conference, 2003. Proceedings. ITC 2003.
影响因子：
--
通讯作者：
J. Walraven
J. Walraven
中科院分区：
其他
文献类型：
--
作者：
J. Walraven

文献摘要

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微电子机械系统(MEMS)已成为许多商业和政府应用的可行产品。MEMS目前被用作数字投影系统的显示器、安全气囊展开系统的传感器、喷墨打印头系统和光学路由器。本文将讨论当前和未来的MEMS应用。
Microelectromechanical Systems (MEMS) have gained acceptance as viable products for many commercial and government applications. MEMS are currently being used as displays for digital projection systems, sensors for airbag deployment systems, inkjet print head systems, and optical routers. This paper will discuss current and future MEMS applications.