5.4-MHz single-crystal silicon wine glass mode disk resonator with quality factor of 2 million
5.4-MHz single-crystal silicon wine glass mode disk resonator with quality factor of 2 million
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DOI：
10.1016/j.sna.2009.02.007
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发表时间：
2009-11-01
影响因子：
4.6
通讯作者：
Seshia, A. A.
中科院分区：
文献类型：
--
作者：
Lee, J. E. -Y.;Seshia, A. A.
本文报告了使用铸造 SOI 微加工工艺在单晶硅中制造的微机械盘谐振器的设计和电气特性。通过反转施加在谐振结构周围选定驱动电极上的直流偏置电压的极性，微谐振器被选择性地以径向延伸模式和酒杯模式激发。在低于 10mTorr 真空的压力下，以径向轮廓模式振动的谐振器的品质因数为 8000，谐振频率为 6.34 MHz。在大约相同的真空压力下，使用 20V 的直流偏置电压，在酒杯谐振模式下测得的谐振器的最高品质因数为 1.9 x 10(6)；谐振频率为 5.43 MHz，使用跨 2.7 μm 驱动间隙施加 60V 直流偏置电压测得的最低运动电阻约为 17 k Omega。这对应于 1.02 x 10(13) 的谐振频率-品质因数 (f-Q) 乘积，是单晶硅微谐振器报道的最高值之一，并且与最好的石英晶体谐振器相当。空气中酒杯模式的品质因数约为 10,000。 (C) 2009 Elsevier B.V. 保留所有权利。
This paper reports the design and electrical characterization of a micromechanical disk resonator fabricated in single crystal silicon using a foundry SOI micromachining process. The microresonator has been selectively excited in the radial extensional and the wine glass modes by reversing the polarity of the DC bias voltage applied on selected drive electrodes around the resonant structure. The quality factor of the resonator vibrating in the radial contour mode was 8000 at a resonant frequency of 6.34 MHz at pressure below 10mTorr vacuum. The highest measured quality factor of the resonator in the wine glass resonant mode was 1.9 x 10(6), using a DC bias voltage of 20V at about the same pressure in vacuum; the resonant frequency was 5.43 MHz and the lowest motional resistance measured was approximately 17 k Omega using a DC bias voltage of 60V applied across 2.7 mu m actuation gaps. This corresponds to a resonant frequency-quality factor (f-Q) product of 1.02 x 10(13), among the highest reported for single crystal silicon microresonators, and on par with the best quartz crystal resonators. The quality factor for the wine glass mode in air was approximately 10,000. (C) 2009 Elsevier B.V. All rights reserved.