Production and visualization of quaternary combinatorial thin films
Production and visualization of quaternary combinatorial thin films
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四元组合薄膜的生产和可视化
DOI：
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发表时间：
2006
期刊：
影响因子：
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通讯作者：
J. Dahn
中科院分区：
文献类型：
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作者：
V. Chevrier;J. Dahn
提出了一种制备四组分（元素或化合物）组合薄膜的新方法。该组合薄膜由九个连续的四组分区域组成，在四元组分空间中产生平面。该方法允许覆盖大的连续区域的四元或pseudoquaternary系统。磁控溅射沉积方法在机械上是简单的，并且使用现有的基础设施。还介绍了新的四元数据可视化软件。该软件可以直接识别组成相关的性质，如X射线衍射强度。以Si、Sn、Co、C四元素组合薄膜为例，介绍了新的制作方法和软件。
A new method for the production of four-component (element or compound) combinatorial thin films is presented. The combinatorial thin film consists of nine continuous four-component regions producing planes in quaternary composition space. The method allows for the coverage of large continuous regions of quaternary or pseudoquaternary systems. The magnetron sputtering deposition method is mechanically simple and uses existing infrastructure. New software for the visualization of quaternary data is also presented. This software allows the straightforward identification of composition-dependent properties such as x-ray diffraction intensities. The new production method and software are demonstrated with a four-element combinatorial thin film containing Si, Sn, Co and C.