Improvement in the sensitivity of SnO2 thin film based NOx gas sensor by loading with single-walled carbon nanotube prepared by pulsed laser deposition process
Improvement in the sensitivity of SnO2 thin film based NOx gas sensor by loading with single-walled carbon nanotube prepared by pulsed laser deposition process
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DOI：
10.1166/sl.2008.451
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发表时间：
2008-08
期刊：
影响因子：
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通讯作者：
M. Bhuiyan;S. Katsuki;T. Ueda;T. Ikegami
中科院分区：
文献类型：
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作者：
M. Bhuiyan;S. Katsuki;T. Ueda;T. Ikegami
二氧化锡（SnO 2）和碳纳米管（CNTs）是在低温下检测NOx气体的有前途的材料。本研究旨在寻求一种新的混合的SnO 2-单壁碳纳米管（SWCNTs）的气体传感器的可行性，通过添加少量的SWCNTs到SnO 2薄膜开发。采用脉冲激光沉积（PLD）技术，在400-500 °C、13.3-26.6 Pa的氧压下，在含有Pt叉指电极的Al 2 O3传感器基底上制备了SnO 2薄膜。在Ar或N2环境气体下，在1000 °C下在反应管中通过脉冲激光烧蚀（PLA）制备SWCNT。利用拉曼光谱和扫描电子显微镜（SEM）对单壁碳纳米管进行了表征。在不同的NO或NO2气体浓度下的载气氮气（N2）或空气中的混合传感器的响应进行了检查。从实验中观察到，混合SWCNTs-SnO 2传感器在室温下的灵敏度和响应时间高于在室温下仅使用CNTs或SnO 2的传感器。因此，少量的单壁碳纳米管负载到SnO 2增加的灵敏度，并降低了工作温度的SnO 2传感器的响应时间。
Tin oxide (SnO2) and carbon nanotubes (CNTs) are promising materials for detecting NOx gas at low operating temperature. This study seeks for the feasibility of a new hybrid SnO2–single-walled carbon nanotubes (SWCNTs) gas sensor, developed by the addition of small amount of SWCNTs into a SnO2 thin film. The SnO2 thin film was prepared by pulsed laser deposition (PLD) on an Al2O3sensor substrate containing prefabricated Pt interdigitated electrodes at temperature of 400–500 °C under oxygen pressure of 13.3–26.6 Pa in the chamber. The SWCNTs were prepared by pulsed laser ablation (PLA) in a reaction tube at 1000 °C under Ar or N2 ambient gas. SWCNTs were characterized by Raman spectroscopy and scanning electron microscopy (SEM). Responses of the fabricated hybrid sensors were examined under different NO or NO2 gas concentration in the carrier gas nitrogen (N2) or air. It was observed from the experiment that the sensitivity and response time of hybrid SWCNTs–SnO2 sensors at room temperature were higher than those sensors using only CNTs or SnO2 at room temperature. Thus small amount of SWCNTs loaded to SnO2 increased the sensitivity and reduced the response time of the SnO2 sensors with lowering the operating temperature.