Metal‐Organic Chemical Vapor Deposition of Environmental Barrier Coatings for All‐Oxide Ceramic Matrix Composites
Metal‐Organic Chemical Vapor Deposition of Environmental Barrier Coatings for All‐Oxide Ceramic Matrix Composites
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全氧化物陶瓷基复合材料环境屏障涂层的金属有机化学气相沉积
DOI：
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发表时间：
2008
期刊：
影响因子：
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通讯作者：
H. Schneider
中科院分区：
文献类型：
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作者：
I. Tröster;S. Samoilenkov;G. Wahl;W. Braue;P. Mechnich;H. Schneider
全氧化物陶瓷基复合材料（CMCs）是一种很有前途的高温结构件。G.燃气轮机和喷气发动机。虽然这些材料本身具有抗氧化性，但它们易于受到燃烧气氛中的水蒸气和其他物质的腐蚀。这个缺点可以通过金属有机化学气相沉积（MOCVD）生产的环境屏障涂层（EBC）来克服，目前IOT正在研究。MOCVD是在中等真空条件下以高沉积速率（高达100微米/小时）生产涂层的便利途径，并且特别有利于复杂形状基底的涂层。基于铝酸钇的EBCs被认为在热气体环境中表现出高的耐腐蚀性。使用钇-和铝-β-二酮盐通过MOCVD涂覆由DLR提供的WHIPOX型CMC。在EBC沉积之前，将粘合涂层施加到基底表面以确保良好的粘附性和均匀的层厚度。通过X射线衍射和扫描电子显微镜对涂层的厚度、结晶度和形貌进行了表征。
All-oxide ceramic matrix composites (CMCs) are promising candidates for structural components in key high-temperature applications, e. g. gas turbines and jet engines. Although inherently oxidation resistant, these materials are prone to corrosive attack by water vapor and other species in the combustion atmosphere. This drawback can be overcome by environmental barrier coatings (EBC) produced via metal-organic chemical vapor deposition (MOCVD), currently being under investigation at IOT. MOCVD is a convenient route to produce coatings at intermediate vacuum conditions with high deposition rates (up to 100 microns/h) and particularly advantageous for coating of complex shaped substrates. EBCs based on yttrium-aluminates are considered to exhibit high corrosion resistance in hot gas environment. WHIPOX-type CMCs provided by DLR were coated by MOCVD using yttrium- and aluminum-beta-diketonates. Prior to EBC deposition a bond coat was applied to substrate surfaces in order to assure good adhesion and uniform layer thickness. The coating thickness, crystallinity and morphology were characterized by x-ray diffraction and scanning electron microscopy.