In-situ observation of polycrystalline Si thin films grown using Al-doped ZnO on glass substrates by the aluminum-induced crystallization

In-situ observation of polycrystalline Si thin films grown using Al-doped ZnO on glass substrates by the aluminum-induced crystallization
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原位观察通过铝诱导结晶在玻璃基板上使用掺铝 ZnO 生长的多晶硅薄膜

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发表时间:
2010
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影响因子:
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通讯作者:
N.Usami
N.Usami
中科院分区:
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文献类型:
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作者:
M.Jung;A.Okada;T.Saito;T.Suemasu;N.Usami

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